📌 Fabrication of Nanomechanical Gas Sensor Array

🔹 Microfabrication on SOI Substrate – Sensors were fabricated using SOI wafers via boron ion implantation, SiO₂ deposition, electrode patterning, and ICP-RIE etching to create piezoresistive sensing elements and silicon slits.

🔹 Polymer Deposition – Four functional polymers (A-D) were precisely deposited onto silicon slits, selectively swelling upon gas absorption to generate mechanical stress, converted into electrical signals.

🔹 Optimization & Stability – FEA simulations (COMSOL Multiphysics) optimized the slit structure for maximum stress concentration and efficient response detection. Heat treatment ensured long-term sensor stability.

🔹 Scalable Batch Processing – A batch-fabrication process enabled high repeatability and mass production, enhancing sensor reliability.

🔹 Final Integration – Sensors were packaged in a 44-pin ceramic case with gold wire bonding for connectivity, demonstrating fast response and recovery in real-world testing.